Advanced Technologies Based on Wave and Beam Generated by Michael A. Lieberman (auth.), H. Schlüter, A. Shivarova

By Michael A. Lieberman (auth.), H. Schlüter, A. Shivarova (eds.)

This quantity is predicated at the lectures on the NATO complex research Institute, entitled "Advanced applied sciences according to Wave and Beam Generated Plasmas", held at Sozopol, Bulgaria, from could 22 until eventually June 1, 1998. It attracted nearly a hundred contributors from sixteen diversified international locations. The assembly mixed sorts of scientists from complex specialists to aspiring younger researchers. It aimed toward stimulating destiny improvement by means of providing-across borders- cross-fertilization and exchanges among formerly unconnected teams. this is often mirrored within the contents of the amount which covers the lectures given. The ebook additionally includes in a moment half forty three poster shows in most cases from more youthful contributors with necessary complementations and specifica­ tions to the lectures. With its themes the complex examine Institute constitutes the 1st try to collect in an geared up demeanour 3 components of labor on plasma applied sciences: complicated efforts in response to wave generated---high frequency-····plasmas, on plasma assisted ion implantation and on electron beam generated plasmas.

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Note the conducting "corner rings" used at the end of the coaxial line structure to ensure that the E-field vector entering the dielectric disk has an axial component and, thus, that there is a component of S along the interface. Furthermore, by adding a conducting plane with holes immediately under the dielectric, it is possible to concentrate the electric field leaking out closer to it, thereby yielding at this location a higher ion current to be extracted immediately beneath. Dielectric Disk Top-fed From Inclined Slots (Nagatsu, Xu, Yamage, Kanoh, Sugai, 1996) .

GENERAL FEATURES The experimental work carried out on SWDs in the 1970's and 1980's was limited to cylindrical hollow dielectric tubes with lengths much larger than R. Such a tube configuration, even though convenient for basic investigations and modeling, was not adequate for some applications. 1 ). At approximately the same time (1989), large-area configurations of a new kind began to be reported, all of them heavily oriented toward plasma processing. The principle of operation of these novel plasma sources is the same as that of the classical long tubular SWDs, although they have some distinct characteristics.

The electromagnetic field is concentrated in the form of a standing surface wave along the interface between the dielectric and the plasma which is sustained on the chamber side of the disk. The substrate holder is located at 30 39 mm from the window. Varying the thickness and electric pennittivity of the disk is used to achieve a radially unifonn density distribution at a given absorbed microwave power. The operating pressure is in the 10-300 mTorr range in argon. run at low microwave powers Coaxial Wav eguide Figure 8 : Planar discharge system with a dielectric disk circwnferentially-fed from a radial line [70].

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